JPH02843Y2 - - Google Patents

Info

Publication number
JPH02843Y2
JPH02843Y2 JP19935084U JP19935084U JPH02843Y2 JP H02843 Y2 JPH02843 Y2 JP H02843Y2 JP 19935084 U JP19935084 U JP 19935084U JP 19935084 U JP19935084 U JP 19935084U JP H02843 Y2 JPH02843 Y2 JP H02843Y2
Authority
JP
Japan
Prior art keywords
sample
hole
electron beam
backscattered
beam path
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP19935084U
Other languages
English (en)
Japanese (ja)
Other versions
JPS61114757U (en]
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP19935084U priority Critical patent/JPH02843Y2/ja
Publication of JPS61114757U publication Critical patent/JPS61114757U/ja
Application granted granted Critical
Publication of JPH02843Y2 publication Critical patent/JPH02843Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Analysing Materials By The Use Of Radiation (AREA)
  • Microscoopes, Condenser (AREA)
JP19935084U 1984-12-28 1984-12-28 Expired JPH02843Y2 (en])

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP19935084U JPH02843Y2 (en]) 1984-12-28 1984-12-28

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP19935084U JPH02843Y2 (en]) 1984-12-28 1984-12-28

Publications (2)

Publication Number Publication Date
JPS61114757U JPS61114757U (en]) 1986-07-19
JPH02843Y2 true JPH02843Y2 (en]) 1990-01-10

Family

ID=30759190

Family Applications (1)

Application Number Title Priority Date Filing Date
JP19935084U Expired JPH02843Y2 (en]) 1984-12-28 1984-12-28

Country Status (1)

Country Link
JP (1) JPH02843Y2 (en])

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6046457A (en) * 1998-01-09 2000-04-04 International Business Machines Corporation Charged particle beam apparatus having anticontamination means
JPWO2007119873A1 (ja) * 2006-04-12 2009-08-27 株式会社日立ハイテクノロジーズ 走査型電子顕微鏡

Also Published As

Publication number Publication date
JPS61114757U (en]) 1986-07-19

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